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We summarized the current enhancement position with the large-electrical power DUV laser both equally with the wavelength of FHG with the one-μm laser and at 193 nm. The new progress of the strong-point out/fiber laser, in addition to the nonlinear optical crystals, prompts not simply the standard ability but also the beam excellent (coherence) of your DUV lasers to an unprecedented level.
As an illustration, The existing concave OC could get replaced by a aircraft mirror which could mitigate the ability density over the area of M1 as well as diamond. Also, using superior destruction threshold coatings for M1 and diamond would also improve the output electric power without any damages. Then, the NIR laser for the 2nd Stokes wavelength could possibly be superior adequate, as well as its very good beam quality, to create the ultimate DUV laser at 193 nm using a substantial average electricity.
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LBO is likewise a fantastic nonlinear crystal which is often applied to the SHG with the NIR towards the inexperienced. The DUV laser is usually recognized by two stages of SFG while in the LBO crystals since there's no period-matching angle for LBO to convert the inexperienced laser at 515 nm or 532 nm on the DUV specifically by SHG [sixteen]. Not long ago, the NSBBF crystal has also demonstrated its likely to get a large conversion efficiency from 532 nm to 266 nm. The wander-off angle and deff of your NSBBF are Just about just like Individuals of CLBO [17].
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the simplest non-linear crystal which generates ultraviolet harmonics from the Nd:YAG basic laser wavelength. As a way to increase the damage threshold, lower CLBO floor roughness, by ultra-precision machining, is necessary. Since the CLBO crystal has effortless hydroscopic response and micro scratches in machining, ultra-precise machining in the CLBO crystal is really a difficult technological dilemma.
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Its UV absorption edge reaches a hundred and eighty nm. The powerful nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about twice as large as that of KDP. CLBO crystals is often grown from the stoichiometric soften with reduced viscosity.
The development in the 193-nm laser was demonstrated by stages of SFG. In order to scale the DUV laser electricity effectively, a whole new notion of your CLBO Crystal 193-nm DUV laser generation is offered dependant on the diamond Raman laser.